- 专利标题: Vibrator device, electronic apparatus, and vehicle
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申请号: US17718418申请日: 2022-04-12
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公开(公告)号: US11940275B2公开(公告)日: 2024-03-26
- 发明人: Seiichiro Ogura , Keiichi Yamaguchi , Ryuta Nishizawa
- 申请人: Seiko Epson Corporation
- 申请人地址: JP Tokyo
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP 19139663 2019.07.30
- 主分类号: G01C19/5642
- IPC分类号: G01C19/5642 ; B60R16/023 ; G01C19/56 ; G01C19/5607 ; G01C19/5656 ; G01P15/18
摘要:
A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.
公开/授权文献
- US20220236057A1 Vibrator Device, Electronic Apparatus, And Vehicle 公开/授权日:2022-07-28
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