- 专利标题: Differential pressure sensor and method of using the same
-
申请号: US18048385申请日: 2022-10-20
-
公开(公告)号: US11953391B2公开(公告)日: 2024-04-09
- 发明人: Sathish Vadlamudi , Manjesh Kumar B , Sudheer Beligere Sreeramu
- 申请人: Honeywell International Inc.
- 申请人地址: US NC Charlotte
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NC Charlotte
- 代理机构: Alston & Bird LLP
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L13/02 ; G01L19/06 ; G01L19/14
摘要:
Various embodiments are directed to a pressure sensor and method of using the same. A pressure sensor may comprise a substrate having a substrate thickness extending between a first substrate surface and a second substrate surface, wherein the first substrate surface and the second substrate surface define opposing ends of the substrate thickness; a first pressure sensing assembly attached to the first substrate surface and configured to detect a first pressure force associated with a first fluid volume, wherein a portion of the first substrate surface adjacent the first pressure sensing assembly is fluidly isolated from the first volume of fluid; and a second pressure sensing assembly attached to the second substrate surface and configured to detect a second pressure force associated with a second volume of fluid, wherein a portion of the second substrate surface adjacent the second pressure sensing assembly is fluidly isolated from the second fluid volume.
公开/授权文献
信息查询