- 专利标题: Fast Lissajous lock control and synchronization of scanning axes of microelectromechanical system
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申请号: US17823404申请日: 2022-08-30
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公开(公告)号: US11953676B2公开(公告)日: 2024-04-09
- 发明人: Norbert Druml , Alberto Garcia Izquierdo
- 申请人: Infineon Technologies AG
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 代理机构: Harrity & Harrity, LLP
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; G01S7/481 ; G02B26/08 ; H03L7/099
摘要:
A method of synchronizing a first oscillation about a first axis with a second oscillation about a second axis includes: generating a first position signal that indicates a position of the first oscillation about the first axis; generating a second position signal that indicates a position of the second oscillation about the first axis; determining a phase difference between the first and the second position signals; comparing the phase difference to a threshold value to generate a comparison result; generating a first reference signal having a first frequency and a second reference signal having a second frequency; synchronizing the first oscillation to the first frequency and synchronizing the second oscillation to the second frequency; monitoring the comparison result; and synchronously triggering a start of the first reference signal and the second reference signal responsive to the comparison result indicating that the phase difference is less than the threshold value.
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