发明授权
- 专利标题: Semiconductor package with redistribution structure and manufacturing method thereof
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申请号: US18155672申请日: 2023-01-17
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公开(公告)号: US11955439B2公开(公告)日: 2024-04-09
- 发明人: Wei-Cheng Wu , Chien-Chia Chiu , Cheng-Hsien Hsieh , Li-Han Hsu , Meng-Tsan Lee , Tsung-Shu Lin
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H01L23/552
- IPC分类号: H01L23/552 ; H01L21/56 ; H01L21/76 ; H01L21/768 ; H01L23/00 ; H01L23/31 ; H01L23/488 ; H01L23/538
摘要:
A semiconductor package includes a semiconductor die, a redistribution structure and connective terminals. The redistribution structure is disposed on the semiconductor die and includes a first metallization tier disposed in between a pair of dielectric layers. The first metallization tier includes routing conductive traces electrically connected to the semiconductor die and a shielding plate electrically insulated from the semiconductor die. The connective terminals include dummy connective terminals and active connective terminals. The dummy connective terminals are disposed on the redistribution structure and are electrically connected to the shielding plate. The active connective terminals are disposed on the redistribution structure and are electrically connected to the routing conductive traces. Vertical projections of the dummy connective terminals fall on the shielding plate.
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