发明授权
- 专利标题: Grinding apparatus
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申请号: US17649625申请日: 2022-02-01
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公开(公告)号: US11967506B2公开(公告)日: 2024-04-23
- 发明人: Mato Hattori , Ichiro Yamahata
- 申请人: DISCO CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: DISCO CORPORATION
- 当前专利权人: DISCO CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: GREER BURNS & CRAIN, LTD.
- 优先权: JP 21020558 2021.02.12
- 主分类号: H01L21/304
- IPC分类号: H01L21/304 ; B24B27/00 ; B24B37/04 ; B24B47/22
摘要:
A grinding apparatus includes a first grinding mechanism, a second grinding mechanism, and a third grinding mechanism for grinding wafers held on respective chuck tables. The first grinding mechanism and the second grinding mechanism are positioned with respect to the chuck tables such that a second ground mark produced on a wafer by second grindstones of the second grinding mechanism as it grinds the wafer extends across a first ground mark produced on the wafer by first grindstones of the first grinding mechanism as it grinds the wafer. The second grinding mechanism and the third grinding mechanism are positioned with respect to the chuck tables such that a third ground mark produced on the wafer by third grindstones of the third grinding mechanism as it grinds the wafer extends across the second ground mark produced on the wafer by the second grindstones.
公开/授权文献
- US20220262641A1 GRINDING APPARATUS 公开/授权日:2022-08-18
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