Invention Grant
- Patent Title: Resonator for testing, method for manufacturing resonator for testing, and method for testing resonator
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Application No.: US18373212Application Date: 2023-09-26
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Publication No.: US11973488B1Publication Date: 2024-04-30
- Inventor: Zhiguo Lai , Qinghua Yang
- Applicant: Suzhou HunterSun Electronics Co., Ltd.
- Applicant Address: CN Suzhou
- Assignee: SUZHOU HUNTERSUN ELECTRONICS CO., LTD.
- Current Assignee: SUZHOU HUNTERSUN ELECTRONICS CO., LTD.
- Current Assignee Address: CN Suzhou
- Agency: Snell & Wilmer L.L.P.
- Priority: CN 2211194706.7 2022.09.29
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L21/66 ; H03H3/02 ; H03H9/13 ; H03H9/17 ; H03H9/02

Abstract:
A resonator for testing, a method for manufacturing a resonator for testing, and a method for testing a resonator are provided. The resonator for testing includes: a testing substrate, a testing bottom electrode, a testing piezoelectric layer, a testing top electrode, at least one first testing electrode, and at least one second testing electrode. The first testing electrode is connected to the testing bottom electrode, the second testing electrode is connected to the testing top electrode, a spacing region is arranged between the first testing electrode and the second testing electrode, and a thickness between the testing piezoelectric layer and at least one of the first testing electrode and the second testing electrode is greater than a predetermined thickness to insulate the first testing electrode and the second testing electrode. With the technical solutions according to the present disclosure, the accuracy of the detected resonance frequency adjustment amount caused by the mass loading layer to be tested is improve.
Public/Granted literature
- US20240120899A1 RESONATOR FOR TESTING, METHOD FOR MANUFACTURING RESONATOR FOR TESTING, AND METHOD FOR TESTING RESONATOR Public/Granted day:2024-04-11
Information query
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