A light source emits excitation light to discharge gas that flows through a dielectric tube. A ground electrode unit includes a first ground electrode and a second ground electrode arranged at a distance from each other in an axial direction of the dielectric tube. A high-voltage electrode is provided between the first ground electrode and the second ground electrode. A first distance between the first ground electrode and the high-voltage electrode is shorter than a second distance between the second ground electrode and the high-voltage electrode. A cover is provided on an outer wall of the dielectric tube at a position between the first ground electrode and the high-voltage electrode. The light source is arranged to emit excitation light such that an optical axis thereof is directed toward a position where the cover is not provided on the outer wall of the dielectric tube.