Invention Grant
- Patent Title: Loading cassette for substrate including glass and substrate loading method to which same is applied
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Application No.: US17433342Application Date: 2020-03-12
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Publication No.: US11981501B2Publication Date: 2024-05-14
- Inventor: Sungjin Kim , Youngho Rho , Jincheol Kim , Byungkyu Jang
- Applicant: ABSOLICS INC.
- Applicant Address: US GA Covington
- Assignee: Absolics Inc.
- Current Assignee: Absolics Inc.
- Current Assignee Address: US GA Covington
- Agency: NSIP Law
- International Application: PCT/KR2020/003480 2020.03.12
- International Announcement: WO2020/185020A 2020.09.17
- Date entered country: 2021-08-24
- Main IPC: B65D85/48
- IPC: B65D85/48 ; H01L21/673 ; H01L21/677

Abstract:
An embodiment relates to a loading cassette and a target substrate loading method to which same is applied. The loading cassette according to the embodiment comprises: an upper plate; a lower plate facing the upper plate while having a space therebetween; an edge support part for connecting the upper plate to the lower plate and supporting the left and right edges of a target substrate; and a rear surface support part for connecting the upper plate to the lower plate and supporting the center and the rear surface-edge of the target substrate.
Information query
IPC分类: