- 专利标题: Early-impact motion limiter for MEMS device
-
申请号: US17542740申请日: 2021-12-06
-
公开(公告)号: US11987492B2公开(公告)日: 2024-05-21
- 发明人: Mikko Partanen
- 申请人: MURATA MANUFACTURING CO., LTD.
- 申请人地址: JP Nagaokakyo
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Nagaokakyo
- 代理机构: SQUIRE PATTON BOGGS (US) LLP
- 优先权: FI 206355 2020.12.22
- 主分类号: B81B3/00
- IPC分类号: B81B3/00
摘要:
This disclosure describes a micromechanical device comprising a first device part and a second device part. One of the first and second device parts is a mobile rotor and the other of the first and second device parts is a fixed stator. The micromechanical device further comprises a motion limiter which extends from the first device part to the second device part. The motion limiter comprises an elongated lever, and the motion limiter is configured to bring a stopper into contact with a counter-structure by rotating the elongated lever.
公开/授权文献
- US20220194781A1 EARLY-IMPACT MOTION LIMITER FOR MEMS DEVICE 公开/授权日:2022-06-23
信息查询