Invention Grant
- Patent Title: Systems and methods for adjusting prediction models between facility locations
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Application No.: US17601503Application Date: 2020-03-12
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Publication No.: US11994848B2Publication Date: 2024-05-28
- Inventor: Johannes Onvlee , Arnaud Hubaux
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 168014 2019.04.09 EP 175717 2019.05.21
- International Application: PCT/EP2020/056653 2020.03.12
- International Announcement: WO2020/207696A 2020.10.15
- Date entered country: 2021-10-05
- Main IPC: G05B19/418
- IPC: G05B19/418

Abstract:
A method for configuring a semiconductor manufacturing process, the method including: providing an initial prediction model including a plurality of model parameters to one or more remote locations; receiving at least one updated model parameter from the one or more remote locations, the at least one model parameter is updated by training the initial prediction model with local data at the one or more remote locations; determining aggregated model parameters based on the at least one updated model parameter received from the one or more remote locations; and adjusting the initial prediction model based on the aggregated model parameters, the adjusted prediction model being operable to configure the semiconductor manufacturing process.
Public/Granted literature
- US20220197264A1 SYSTEMS AND METHODS FOR ADJUSTING PREDICTION MODELS BETWEEN FACILITY LOCATIONS Public/Granted day:2022-06-23
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