- 专利标题: Package structure and method of fabricating the same
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申请号: US18079854申请日: 2022-12-12
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公开(公告)号: US11996381B2公开(公告)日: 2024-05-28
- 发明人: Hui-Jung Tsai , Hung-Jui Kuo , Jyun-Siang Peng
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/48 ; H01L23/538 ; H01L25/00 ; H01L25/065 ; H01L23/498
摘要:
A method of fabricating an integrated fan-out package is provided. The method includes the following steps. An integrated circuit component is provided on a substrate. An insulating encapsulation is formed on the substrate to encapsulate sidewalls of the integrated circuit component. A redistribution circuit structure is formed along a build-up direction on the integrated circuit component and the insulating encapsulation. The formation of the redistribution circuit structure includes the following steps. A dielectric layer and a plurality of conductive vias embedded in the dielectric layer are formed, wherein a lateral dimension of each of the conductive vias decreases along the build-up direction. A plurality of conductive wirings is formed on the plurality of conductive vias and the dielectric layer. An integrated fan-out package of the same is also provided.
公开/授权文献
- US20230111006A1 PACKAGE STRUCTURE AND METHOD OF FABRICATING THE SAME 公开/授权日:2023-04-13
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