Invention Grant
- Patent Title: Piezoelectric based MEMS device with time sharing actuation and sensing circuitry
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Application No.: US17238596Application Date: 2021-04-23
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Publication No.: US12001012B2Publication Date: 2024-06-04
- Inventor: Davide Terzi , Gianluca Mendicino , Dadi Sharon
- Applicant: STMicroelectronics S.r.l. , STMicroelectronics Ltd
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.,STMicroelectronics Ltd
- Current Assignee: STMicroelectronics S.r.l.,STMicroelectronics Ltd
- Current Assignee Address: IT Agrate Brianza; IL Netanya
- Agency: Crowe & Dunlevy LLC
- Main IPC: G02B26/10
- IPC: G02B26/10 ; B81B3/00 ; G02B26/08 ; G09G3/34 ; H02N2/10 ; H02N2/14 ; H03H9/15 ; H10N30/20 ; H10N30/853

Abstract:
Disclosed herein is a microelectromechanical (MEMS) device, including a rotor and a first piezoelectric actuator mechanically coupled to the rotor. The first piezoelectric actuator is electrically coupled between a first signal node and a common voltage node. A second piezoelectric actuator is mechanically coupled to the rotor, and is electrically coupled between a second signal node and the common voltage node. Control circuitry includes a drive circuit configured to drive the first and second piezoelectric actuators, a sense circuit configured to process sense signals generated by the first and second pizeoelectric actuators, and a multiplexing circuit. The multiplexing circuit is configured to alternate between connecting the drive circuit to the first piezoelectric actuator while connecting the sense circuit to the second piezoelectric actuator, and connecting the drive circuit to the second piezoelectric actuator while connecting the sense circuit to the first piezoelectric actuator.
Public/Granted literature
- US20220342205A1 PIEZOELECTRIC BASED MEMS DEVICE WITH TIME SHARING ACTUATION AND SENSING CIRCUITRY Public/Granted day:2022-10-27
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