发明授权
- 专利标题: Piezoelectric based MEMS device with time sharing actuation and sensing circuitry
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申请号: US17238596申请日: 2021-04-23
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公开(公告)号: US12001012B2公开(公告)日: 2024-06-04
- 发明人: Davide Terzi , Gianluca Mendicino , Dadi Sharon
- 申请人: STMicroelectronics S.r.l. , STMicroelectronics Ltd
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.l.,STMicroelectronics Ltd
- 当前专利权人: STMicroelectronics S.r.l.,STMicroelectronics Ltd
- 当前专利权人地址: IT Agrate Brianza; IL Netanya
- 代理机构: Crowe & Dunlevy LLC
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; B81B3/00 ; G02B26/08 ; G09G3/34 ; H02N2/10 ; H02N2/14 ; H03H9/15 ; H10N30/20 ; H10N30/853
摘要:
Disclosed herein is a microelectromechanical (MEMS) device, including a rotor and a first piezoelectric actuator mechanically coupled to the rotor. The first piezoelectric actuator is electrically coupled between a first signal node and a common voltage node. A second piezoelectric actuator is mechanically coupled to the rotor, and is electrically coupled between a second signal node and the common voltage node. Control circuitry includes a drive circuit configured to drive the first and second piezoelectric actuators, a sense circuit configured to process sense signals generated by the first and second pizeoelectric actuators, and a multiplexing circuit. The multiplexing circuit is configured to alternate between connecting the drive circuit to the first piezoelectric actuator while connecting the sense circuit to the second piezoelectric actuator, and connecting the drive circuit to the second piezoelectric actuator while connecting the sense circuit to the first piezoelectric actuator.
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