Invention Grant
- Patent Title: Laser focussing module
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Application No.: US17600763Application Date: 2020-04-03
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Publication No.: US12007693B2Publication Date: 2024-06-11
- Inventor: Ruud Antonius Catharina Maria Beerens , Nico Johannes Antonius Hubertus Boonen , Stefan Michael Bruno Bäumer , Tolga Mehmet Ergin , Andreas Kristian Hopf , Derk Jan Wilfred Klunder , Martin Anton Lambert , Stefan Piehler , Manisha Ranjan , Frank Bernhard Sperling , Andrey Sergeevich Tychkov , Jasper Witte , Jiayue Yuan
- Applicant: ASML Netherlands B.V. , Trumpf Lasersystems For Semiconductor Manufacturing GmbH
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B. V.,Trumpf Lasersystems For Semiconductor Manufacturing GmbH
- Current Assignee: ASML Netherlands B. V.,Trumpf Lasersystems For Semiconductor Manufacturing GmbH
- Current Assignee Address: NL Veldhoven; DE Ditzingen
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP 167261 2019.04.04
- International Application: PCT/EP2020/059614 2020.04.03
- International Announcement: WO2020/201530A 2020.10.08
- Date entered country: 2021-10-01
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H01S3/00 ; H05G2/00

Abstract:
A laser focusing system (330) for use in an EUV radiation source is described, the laser focusing system comprising: •—a first curved mirror (330.1) configured to receive a laser beam from a beam delivery system (320) and generate a first reflected laser beam (316); •—a second curved mirror (330.2) configured to receive the first reflected laser beam (316) and generate a second reflected laser beam (317), wherein the laser focusing system (330) is configured to focus the second reflected laser beam (317) to a target location (340) in a vessel (350) of the EUV radiation source (360).
Public/Granted literature
- US20220206397A1 LASER FOCUSSING MODULE Public/Granted day:2022-06-30
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