- Patent Title: Rotatable faraday cleaning apparatus and plasma processing system
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Application No.: US17626496Application Date: 2020-02-28
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Publication No.: US12009188B2Publication Date: 2024-06-11
- Inventor: Haiyang Liu , Dongdong Hu , Xiaobo Liu , Na Li , Shiran Cheng , Song Guo , Zhihao Wu , Kaidong Xu
- Applicant: JIANGSU LEUVEN INSTRUMENTS CO., LTD
- Applicant Address: CN Jiangsu
- Assignee: JIANGSU LEUVEN INSTRUMENTS CO., LTD
- Current Assignee: JIANGSU LEUVEN INSTRUMENTS CO., LTD
- Current Assignee Address: CN Jiangsu
- Agency: JCIPRNET
- Priority: CN 1911413106.3 2019.12.31
- International Application: PCT/CN2020/077309 2020.02.28
- International Announcement: WO2021/134890A 2021.07.08
- Date entered country: 2022-01-12
- Main IPC: H01J37/32
- IPC: H01J37/32 ; B08B9/00 ; B08B13/00

Abstract:
The present invention provides a rotatable faraday cleaning apparatus and a plasma processing system, said apparatus comprising a cavity cover, a motor, an eccentric wheel, a long-petalled assembly, a coupling window, a gas intake nozzle, a connecting rod, a short-petalled assembly, a first sector-shaped conductor, and a second sector-shaped conductor; the cavity cover is assembled on a reactor cavity main body, the coupling window is mounted on the cavity cover, the gas intake nozzle is provided on the coupling window, the first sector-shaped conductor is assembled on the gas intake nozzle, the second sector-shaped conductor is assembled on the gas intake nozzle, the long-petalled assembly is assembled on the gas intake nozzle, the short-petalled assembly is assembled on the gas intake nozzle, the connecting rod is assembled on the long-petalled assembly, the eccentric wheel is assembled on the connecting rod, and the motor is mounted on the eccentric wheel.
Public/Granted literature
- US20220297168A1 ROTATABLE FARADAY CLEANING APPARATUS AND PLASMA PROCESSING SYSTEM Public/Granted day:2022-09-22
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