- 专利标题: Carbyne-based sensing device for high spatial resolution in DNA sequencing and biomolecule characterization and method of fabricating the same
-
申请号: US17173839申请日: 2021-02-11
-
公开(公告)号: US12012329B2公开(公告)日: 2024-06-18
- 发明人: Steve Tung , Bo Ma , Ty Seiwert
- 申请人: Steve Tung , Bo Ma , Ty Seiwert
- 申请人地址: US AR Fayetteville
- 专利权人: Board of Trustees of the University of Arkansas
- 当前专利权人: Board of Trustees of the University of Arkansas
- 当前专利权人地址: US AR Little Rock
- 代理商 Richard Blakely Glasgow
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; B32B7/02 ; B32B7/12 ; B81C3/00 ; C12Q1/6869
摘要:
A method of fabricating a sensing device for DNA sequencing and biomolecule characterization including the steps of fabricating a microelectrode chip having a silicon substrate and a silicon nitride diaphragm, attaching a monolayer graphene sheet to the silicon nitride diaphragm, dicing a portion of the monolayer graphene sheet to form a graphene microribbon, converting the graphene microribbon to a graphene nanoribbon, and converting the graphene nanoribbon to a carbyne. A sensing device for DNA sequencing and biomolecule characterization is also disclosed. The sensing device includes a silicon substrate, a cavity in the silicon substrate covered by a silicon nitride layer, microelectrodes attached to the silicon nitride layer, graphene covering the microelectrodes, and carbyne attached to a portion of the silicon nitride layer covering said cavity.
公开/授权文献
信息查询