- 专利标题: Solid-state imaging device, method of manufacturing the same, and electronic apparatus capable to protect a photoelectric conversion film
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申请号: US16940228申请日: 2020-07-27
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公开(公告)号: US12015040B2公开(公告)日: 2024-06-18
- 发明人: Shigehiro Ikehara , Masahiro Joei
- 申请人: SONY CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: SONY CORPORATION
- 当前专利权人: SONY CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: CHIP LAW GROUP
- 优先权: JP 16065608 2016.03.29
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L21/02 ; H01L31/0216 ; H04N25/76 ; H10K30/88 ; H10K39/32
摘要:
The present technology relates to a solid-state imaging device capable of protecting a photoelectric conversion film with a sealing film that has excellent sealing properties and coverage, a method of manufacturing the solid-state imaging device, and an electronic apparatus. A solid-state imaging device includes: a photoelectric conversion film formed on the upper side of a semiconductor substrate; and a sealing film that is formed on the upper layer of the photoelectric conversion film and has a lower etching rate than that of silicon oxide. The present technology can be applied to solid-state imaging devices having a photoelectric conversion film on the upper side of a semiconductor substrate, and the like, for example.
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