Invention Grant
- Patent Title: Plasma processing device, and plasma processing method
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Application No.: US17440613Application Date: 2020-03-13
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Publication No.: US12020900B2Publication Date: 2024-06-25
- Inventor: Munehito Kagaya , Satoru Kawakami , Tsuyoshi Moriya , Tatsuo Matsudo , Jun Yamawaku , Hiroyuki Onoda
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Fenwick & West LLP
- Priority: JP 19055552 2019.03.22
- International Application: PCT/JP2020/011247 2020.03.13
- International Announcement: WO2020/195980A 2020.10.01
- Date entered country: 2021-09-17
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/02

Abstract:
There is provided a plasma processing device. The plasma processing device comprises: a processing chamber; a partition plate that has an insulating property, and configured to partition a space in the processing chamber into a reaction chamber in which an object to be processed is mounted and a plasma generating chamber in which plasma is generated, wherein a first electrode is provided on a surface of the partition plate on the side of the plasma generating chamber, and the partition plate has a plurality of through holes formed for supplying active species contained in the plasma generated in the plasma generating chamber to the reaction chamber; a second electrode disposed in the plasma generating chamber so as to face the first electrode; and a power supply configured to supply high-frequency power obtained by phase-controlling and superimposing high-frequency powers of a plurality of frequencies to one of the first electrode and the second electrode when the plasma is generated in the plasma generating chamber.
Public/Granted literature
- US20220165544A1 PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD Public/Granted day:2022-05-26
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