Invention Grant
- Patent Title: Real-time direct measurement of mechanical properties in-situ of scanning beam microscope
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Application No.: US18079759Application Date: 2022-12-12
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Publication No.: US12027343B2Publication Date: 2024-07-02
- Inventor: Joseph Favata , SIna Shahbazmohamadi , Valery Ray , Ali Hadjikhani
- Applicant: University of Connecticut
- Applicant Address: US CT Farmington
- Assignee: University of Connecticut
- Current Assignee: University of Connecticut
- Current Assignee Address: US CT Farmington
- Agency: Michael Best & Friedrich LLP
- Main IPC: G01N3/08
- IPC: G01N3/08 ; G01N3/06 ; H01J37/244 ; H01J37/256
Abstract:
System and methods are described for directly measuring mechanical properties of a sample while concurrently imaging the sample using a scanning beam microscope (e.g., a scanning electron microscope (SEM)).
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