Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US17548594Application Date: 2021-12-13
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Publication No.: US12027349B2Publication Date: 2024-07-02
- Inventor: Shinsuke Oka
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP 20206801 2020.12.14
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus is provided. The plasma processing apparatus comprises: a dielectric member having a placement surface on which an object to be processed is placed and a back surface opposite to the placement surface, and having a first through-hole penetrating through the placement surface and the back surface; a mounting table having a support surface for supporting the dielectric member and a base having a second through-hole communicating with the first through-hole; and an embedded member disposed in the first through-hole and the second through-hole, wherein the embedded member includes a first embedded member disposed in the first through-hole and a second embedded member disposed in the second through-hole, and the rigidity of the second embedded member is lower than the rigidity of the first embedded member.
Public/Granted literature
- US20220189748A1 PLASMA PROCESSING APPARATUS Public/Granted day:2022-06-16
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