- 专利标题: Semiconductor device including recessed interconnect structure
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申请号: US17836896申请日: 2022-06-09
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公开(公告)号: US12033935B2公开(公告)日: 2024-07-09
- 发明人: Guo-Huei Wu , Hui-Zhong Zhuang , Chih-Liang Chen , Cheng-Chi Chuang , Shang-Wen Chang , Yi-Hsun Chiu
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: FOLEY & LARDNER LLP
- 分案原申请号: US16803497 2020.02.27
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/522 ; H01L23/528
摘要:
A semiconductor device includes a first gate structure extending along a first lateral direction. The semiconductor device includes a first interconnect structure, disposed above the first gate structure, that extends along a second lateral direction perpendicular to the first lateral direction. The first interconnect structure includes a first portion and a second portion electrically isolated from each other by a first dielectric structure. The semiconductor device includes a second interconnect structure, disposed between the first gate structure and the first interconnect structure, that electrically couples the first gate structure to the first portion of the first interconnect structure. The second interconnect structure includes a recessed portion that is substantially aligned with the first gate structure and the dielectric structure along a vertical direction.
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