- 专利标题: Semiconductor storage device and method for manufacturing the same
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申请号: US17458181申请日: 2021-08-26
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公开(公告)号: US12041777B2公开(公告)日: 2024-07-16
- 发明人: Kohei Nakagami
- 申请人: Kioxia Corporation
- 申请人地址: JP Tokyo
- 专利权人: KIOXIA CORPORATION
- 当前专利权人: KIOXIA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Foley & Lardner LLP
- 优先权: JP 21024244 2021.02.18
- 主分类号: H10B43/35
- IPC分类号: H10B43/35 ; G11C16/04 ; H01L29/423 ; H01L29/66 ; H01L29/792 ; H10B43/10 ; H10B43/20
摘要:
A device includes a semiconductor substrate including a first well region and a second well region; a first transistor including a first gate insulating layer provided above the first well region, a first gate electrode having a semiconductor, and a second gate electrode having a metal; a second transistor including a second gate insulating layer provided above the second well region, a third gate electrode having a semiconductor, and a fourth gate electrode having a metal; an element isolation area disposed between the first and second well regions; and a first insulating layer formed above the element isolation area. The first insulating layer has a first portion extending over the first gate electrode and a second portion extending over the third gate electrode, a portion of the second gate electrode is formed above the first portion, and a portion of the fourth gate electrode is formed above the second portion.
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