Invention Grant
- Patent Title: Compositions for removing photoresists and methods of manufacturing semiconductor devices and semiconductor packages using the compositions
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Application No.: US17569556Application Date: 2022-01-06
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Publication No.: US12044974B2Publication Date: 2024-07-23
- Inventor: Hyojin Yun , Seungwon Kim , Taeyoung Kim , Woojung Park , Jinhye Bae , Hyunseop Shin , Mintae Lee , Hoon Han , Moonyoung Kim , Moonchang Kim , Cheolmo Yang , Yunseok Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.,KPX CHEMICAL CO., LTD
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.,KPX CHEMICAL CO., LTD
- Current Assignee Address: KR Suwon-si; KR Seoul
- Agency: Myers Bigel, P.A.
- Priority: KR 20210057482 2021.05.03
- Main IPC: G03F7/42
- IPC: G03F7/42 ; B08B3/04 ; C11D3/04 ; H01L21/02

Abstract:
A photoresist-removing composition includes a polar organic solvent, an alkyl ammonium hydroxide, an aliphatic amine not including a hydroxy group, and a monovalent alcohol. To manufacture a semiconductor device, a photoresist pattern may be formed on a substrate, and the photoresist-removing composition may then be applied to the photoresist pattern. To manufacture a semiconductor package, a photoresist pattern including a plurality of via holes may be formed on a substrate. A plurality of conductive posts including a metal may be formed inside the plurality of via holes, and the photoresist pattern may be removed by applying a photoresist-removing composition of the inventive concept to the photoresist pattern. A semiconductor chip may be adhered to the substrate between the respective conductive posts.
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