发明授权
- 专利标题: Anti-ferroelectric thin-film structure and electronic device including the same
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申请号: US17702155申请日: 2022-03-23
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公开(公告)号: US12051717B2公开(公告)日: 2024-07-30
- 发明人: Boeun Park , Yongsung Kim , Jeonggyu Song , Jooho Lee
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd
- 当前专利权人: Samsung Electronics Co., Ltd
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR 20210096717 2021.07.22
- 主分类号: H10B53/00
- IPC分类号: H10B53/00 ; H01L49/02
摘要:
An anti-ferroelectric thin-film structure including a dielectric layer including an anti-ferroelectric phase of hafnium oxide; and an inserted layer in the dielectric layer, the inserted layer including an oxide. An electronic device to which the anti-ferroelectric thin-film structure has been applied may secure an operating voltage section with little hysteresis.
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