Invention Grant
- Patent Title: Sealing equipment
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Application No.: US16980638Application Date: 2019-03-13
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Publication No.: US12055220B2Publication Date: 2024-08-06
- Inventor: Toshihiro Kawai , Gengoro Ogura
- Applicant: Sinfonia Technology Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Sinfonia Technology Co., Ltd.
- Current Assignee: Sinfonia Technology Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: JP 18048421 2018.03.15
- International Application: PCT/JP2019/010351 2019.03.13
- International Announcement: WO2019/177047A 2019.09.19
- Date entered country: 2020-09-14
- Main IPC: B23P19/00
- IPC: B23P19/00 ; F16J15/10 ; H01L21/673

Abstract:
A housing is made sealable even when the rigidity of a frame member and a cover member is not high. In an EFEM, a pressure difference having a predetermined value or less exists between an internal space of a housing and an external space of the housing. The housing includes a frame member assembled so as to form an opening, a cover member attached to the frame member so as to cover the opening, and a seal member sandwiched between the frame member and the cover member and configured to extend so as to surround the opening. The frame member and the cover member are formed of a sheet metal. The seal member is an elastic member having a hollow cross section orthogonal to an extension direction of the seal member.
Public/Granted literature
- US20210010598A1 SEALING EQUIPMENT Public/Granted day:2021-01-14
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