Invention Grant
- Patent Title: Piezoelectric MEMS microphone
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Application No.: US18140577Application Date: 2023-04-27
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Publication No.: US12058939B2Publication Date: 2024-08-06
- Inventor: Karl Grosh , Robert J. Littrell
- Applicant: The Regents of the University of Michigan , Qualcomm Technologies, Inc.
- Applicant Address: US MI Ann Arbor
- Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN,QUALCOMM TECHNOLOGIES, INC.
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN,QUALCOMM TECHNOLOGIES, INC.
- Current Assignee Address: US MI Ann Arbor; US CA San Diego
- Agency: REISING ETHINGTON P.C.
- Main IPC: H10N30/50
- IPC: H10N30/50 ; B81B3/00 ; B81B7/00 ; B81B7/02 ; H04R17/00 ; H04R17/02 ; H10N30/30 ; H10N30/853

Abstract:
A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.
Public/Granted literature
- US20230337544A1 PIEZOELECTRIC MEMS MICROPHONE Public/Granted day:2023-10-19
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