Invention Grant
- Patent Title: Sensors having an active surface
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Application No.: US17804023Application Date: 2022-05-25
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Publication No.: US12062674B2Publication Date: 2024-08-13
- Inventor: Arvin Emadi , Arnaud Rival , Ali Agah
- Applicant: Illumina, Inc.
- Applicant Address: US CA San Diego
- Assignee: Illumina, Inc.
- Current Assignee: Illumina, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Heslin Rothenberg Farley & Mesiti PC
- Agent Rachel L. Pearlman, Esq.
- The original application number of the division: US15929760 2020.05.20
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L23/00

Abstract:
Disclosed in one example is an apparatus including a substrate, a sensor over the substrate including an active surface and a sensor bond pad, a molding layer over the substrate and covering sides of the sensor, the molding layer having a molding height relative to a top surface of the substrate that is greater than a height of the active surface of the sensor relative to the top surface of the substrate, and a lidding layer over the molding layer and over the active surface. The lidding layer and the molding layer form a space over the active surface of the sensor that defines a flow channel.
Public/Granted literature
- US20220367547A1 SENSORS HAVING AN ACTIVE SURFACE Public/Granted day:2022-11-17
Information query
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