- Patent Title: Vertical memory device having first contact plugs connected to plurality of staircase gate electrodes, respectively and second contact plugs extending through the staircase gate structure in the pad region
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Application No.: US17728759Application Date: 2022-04-25
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Publication No.: US12063781B2Publication Date: 2024-08-13
- Inventor: Kohji Kanamori , Min-Yeong Song , Shin-Hwan Kang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20160056153 2016.05.09
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H10B43/10 ; H10B43/27 ; H10B43/40 ; H10B43/50

Abstract:
A vertical memory device includes a lower circuit pattern on a substrate, a plurality of gate electrodes spaced apart from another in a first direction substantially perpendicular to an upper surface of the substrate on the lower circuit pattern, a channel extending through the gate electrodes in the first direction, a memory cell block including a first common source line (CSL) extending in a second direction substantially parallel to the upper surface of the substrate, and a first contact plug connected to the lower circuit pattern and the first CSL and overlapping the first CSL in the first direction.
Public/Granted literature
- US20220254808A1 VERTICAL MEMORY DEVICES Public/Granted day:2022-08-11
Information query
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