System and method for repairing vacancies resulting from mass transfer of devices
摘要:
A method utilizes a target substrate has an array of chips on a carrier with a plurality of vacancies and a plurality of donor coupons are incompletely filled with functional chips. A bounding box is defined that encompasses the vacancies on the target substrate. Outcomes are simulated by overlapping a representation of the bounding box over a representation of each of a plurality of donor coupons at a plurality of translational offsets on a substrate plane to determine matches. An optimal one of the outcomes is found at a selected one or more of the donor coupons corresponding one or more offsets. A parallel transfer of the matching functional chips fills the vacancies on the target substrate using the one or more selected donor coupons and corresponding one or more offsets.
信息查询
0/0