发明授权
- 专利标题: System and method for repairing vacancies resulting from mass transfer of devices
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申请号: US17234173申请日: 2021-04-19
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公开(公告)号: US12068430B2公开(公告)日: 2024-08-20
- 发明人: Evgeniy Bart , Yunda Wang , Matthew Shreve
- 申请人: Palo Alto Research Center Incorporated
- 申请人地址: US CA Palo Alto
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: US CT Norwalk
- 代理机构: Mueting Raasch Group
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L21/683 ; H01L25/075 ; H01L33/62
摘要:
A method utilizes a target substrate has an array of chips on a carrier with a plurality of vacancies and a plurality of donor coupons are incompletely filled with functional chips. A bounding box is defined that encompasses the vacancies on the target substrate. Outcomes are simulated by overlapping a representation of the bounding box over a representation of each of a plurality of donor coupons at a plurality of translational offsets on a substrate plane to determine matches. An optimal one of the outcomes is found at a selected one or more of the donor coupons corresponding one or more offsets. A parallel transfer of the matching functional chips fills the vacancies on the target substrate using the one or more selected donor coupons and corresponding one or more offsets.
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