Pre-concentrator with aligned three-dimensional porous structure and method of manufacturing the same
Abstract:
The disclosed pre-concentrator comprises: a base substrate having a trench; a metal layer conformally disposed along the inner surface of the trench; and a three-dimensional porous nanostructure disposed on the metal layer in the trench and having aligned pores connected to each other in three dimensions. The pre-concentrator can improve the concentration performance of a sample and the thermal desorption efficiency of a concentrated sample.
Public/Granted literature
Information query
Patent Agency Ranking
0/0