- 专利标题: Force measurement device and method for bonding or encapsulation process and apparatus incorporating the device
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申请号: US17683453申请日: 2022-03-01
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公开(公告)号: US12072251B2公开(公告)日: 2024-08-27
- 发明人: Ka Shing Kwan , Ajit Shriman Gaunekar , Zhi Tao Wang
- 申请人: ASMPT SINGAPORE PTE. LTD.
- 申请人地址: SG Singapore
- 专利权人: ASMPT SINGAPORE PTE. LTD.
- 当前专利权人: ASMPT SINGAPORE PTE. LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: OSTROLENK FABER LLP
- 主分类号: G01L1/04
- IPC分类号: G01L1/04 ; B22F3/03 ; B22F3/12
摘要:
A device for measuring a force applied to a component when the component is being bonded to a component carrier, or when the component is being encapsulated includes a deformable portion and a contacting stem connected to the deformable portion. The deformable portion is configured to incorporate a sensor for detecting a degree of deformation of the deformable portion caused by application of the force in order to measure the force. In use, the contacting stem is positionable to contact the component or the component carrier so that the deformable portion is deformed when the force is applied to the component. One or more such devices may be included in a sintering or encapsulation apparatus for measuring the said force.
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