- 专利标题: Pressure sensor device
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申请号: US17639167申请日: 2020-08-28
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公开(公告)号: US12072256B2公开(公告)日: 2024-08-27
- 发明人: Masanori Kobayashi , Ken Unno , Tetsuya Sasahara , Kohei Nawaoka
- 申请人: TDK CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: TDK CORPORATION
- 当前专利权人: TDK CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP 19164000 2019.09.09
- 国际申请: PCT/JP2020/032661 2020.08.28
- 国际公布: WO2021/049328A 2021.03.18
- 进入国家日期: 2022-02-28
- 主分类号: G01L19/14
- IPC分类号: G01L19/14 ; G01L9/00 ; G01L9/04
摘要:
A sensor element suitable for miniaturization. This pressure sensor element has: a metal plate; an insulating film provided on a first surface, which is one surface of the metal plate, so as to form a covered region in which the first plate is covered and an exposed region in which the first surface is exposed; and a pressure detection circuit formed on the insulating film so as to be insulated from the first surface by means of the insulating film.
公开/授权文献
- US20220291068A1 PRESSURE SENSOR DEVICE 公开/授权日:2022-09-15
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