Invention Grant
- Patent Title: Methods of forming integrated circuit structures for capacitive sense NAND memory
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Application No.: US17876718Application Date: 2022-07-29
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Publication No.: US12080356B2Publication Date: 2024-09-03
- Inventor: Yoshiaki Fukuzumi , Jun Fujiki , Shuji Tanaka , Masashi Yoshida , Masanobu Saito , Yoshihiko Kamata
- Applicant: MICRON TECHNOLOGY, INC.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: G11C16/04
- IPC: G11C16/04 ; G11C16/26

Abstract:
Methods of forming integrated circuit structures for a capacitive sense NAND memory include forming a first semiconductor overlying a dielectric, forming a second semiconductor to be in contact with a first end of the first semiconductor, forming a third semiconductor to be in contact with a second end of the first semiconductor opposite the first end of the first semiconductor, forming a vertical channel material structure overlying the first semiconductor and having a channel material capacitively coupled to the first semiconductor, and forming a plurality of series-connected field-effect transistors adjacent the vertical channel material structure.
Public/Granted literature
- US20220383960A1 METHODS OF FORMING INTEGRATED CIRCUIT STRUCTURES FOR CAPACITIVE SENSE NAND MEMORY Public/Granted day:2022-12-01
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