Optical waveguide element and optical modulation element
Abstract:
An optical waveguide element includes: an optical waveguide having a ridge part and a slab part having a thickness less than the ridge part. The optical waveguide includes: a first waveguide having a first ridge with and a first slab film thickness; a second waveguide having a second ridge width and a second slab film thickness; a first intermediate waveguide connected to the first waveguide and having a third ridge width and the first slab film thickness; and a second intermediate waveguide connected to the second waveguide and having a fourth ridge width and the second slab film thickness. The first waveguide, the first intermediate waveguide, the second intermediate waveguide, and the second waveguide are arranged in this order; the second slab film thickness is larger than the first slab film thickness; and the third ridge width is larger than the fourth ridge width.
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