Invention Grant
- Patent Title: Detection apparatus for simultaneous acquisition of multiple diverse images of an object
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Application No.: US17608015Application Date: 2020-04-02
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Publication No.: US12086973B2Publication Date: 2024-09-10
- Inventor: Teunis Willem Tukker , Arie Jeffrey Den Boef , Nitesh Pandey , Marinus Petrus Reijnders , Ferry Zijp
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP 174102 2019.05.13 EP 176202 2019.05.23 EP 179763 2019.06.12 EP 195127 2019.09.03
- International Application: PCT/EP2020/059328 2020.04.02
- International Announcement: WO2020/229049A 2020.11.19
- Date entered country: 2021-11-01
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N21/47 ; G02B5/30 ; G02B27/28 ; G02B27/42 ; G03F7/00

Abstract:
Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.
Public/Granted literature
- US20220172347A1 DETECTION APPARATUS FOR SIMULTANEOUS ACQUISITION OF MULTIPLE DIVERSE IMAGES OF AN OBJECT Public/Granted day:2022-06-02
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