- 专利标题: Semiconductor interconnect structure with double conductors
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申请号: US17068230申请日: 2020-10-12
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公开(公告)号: US12087685B2公开(公告)日: 2024-09-10
- 发明人: Benjamin D. Briggs , Takeshi Nogami , Raghuveer R. Patlolla
- 申请人: Tessera LLC
- 申请人地址: US CA San Jose
- 专利权人: Tessera LLC
- 当前专利权人: Tessera LLC
- 当前专利权人地址: US CA San Jose
- 代理机构: HALEY GUILIANO LLP
- 分案原申请号: US15097033 2016.04.12
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L21/768 ; H01L23/532
摘要:
Embodiments are directed to a semiconductor structure having a dual-layer interconnect and a barrier layer. The interconnect structure combines a first conductive layer, a second conductive layer, and a barrier layer disposed between. The result is a low via resistance combined with improved electromigration performance. In one embodiment, the first conductive layer is copper, the second conductive layer is cobalt, and the barrier layer is tantalum nitride. A barrier layer is not used in other embodiments. Other embodiments are also disclosed.
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