- 专利标题: Integrated short channel omega gate FinFET and long channel FinFET
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申请号: US17517924申请日: 2021-11-03
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公开(公告)号: US12100766B2公开(公告)日: 2024-09-24
- 发明人: Alexander Reznicek , Oleg Gluschenkov , Ruilong Xie
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Matthew Zehrer
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L21/336 ; H01L21/8234 ; H01L27/088 ; H01L29/66 ; H01L29/78
摘要:
An integrated short channel omega gate FinFET and long channel FinFET semiconductor device includes a first fin and second fin on a buried oxide (BOX) layer. The BOX layer includes a fin well outside and substantially adjoining a footprint of a respective fin. A first gate dielectric layer is upon the second fin and a second gate dielectric layer is upon the first dielectric layer. The BOX layer further includes an undercut below the first fin that exposes a portion of a bottom surface of the first fin. An omega-gate is around the first fin. A tri-gate is upon the second gate dielectric layer over the second fin.
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