- 专利标题: Plating apparatus having conductive liquid and plating method
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申请号: US17974239申请日: 2022-10-26
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公开(公告)号: US12104266B2公开(公告)日: 2024-10-01
- 发明人: Jaewon Choi , Jaesik Chung
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey, & Pierce, P.L.C
- 优先权: KR 20210178677 2021.12.14
- 主分类号: C25D17/00
- IPC分类号: C25D17/00
摘要:
A plating apparatus may include a body, a lip seal structure connected to the body, and a conductive liquid. The body may include a cathode. The lip seal structure may be configured to hold a wafer. The lip seal structure may include a bottom portion, a contact portion connected to the bottom portion and contacting the wafer, and at least one partition structure protruding from an upper surface of the bottom portion. The conductive liquid may cover the upper surface of the bottom portion and may be configured to electrically connect the cathode and the wafer.
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