Invention Grant
- Patent Title: Coating-type composition for forming organic film, patterning process, polymer, and method for manufacturing polymer
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Application No.: US17183989Application Date: 2021-02-24
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Publication No.: US12105420B2Publication Date: 2024-10-01
- Inventor: Keisuke Niida , Daisuke Kori , Yasuyuki Yamamoto , Takayoshi Nakahara , Tsutomu Ogihara
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 2038165 2020.03.05
- Main IPC: G03F7/09
- IPC: G03F7/09 ; C08G61/10 ; C08L65/00 ; C09D165/00 ; G03F7/00 ; G03F7/11 ; H01L21/027

Abstract:
The present invention provides a coating-type composition for forming an organic film containing: a polymer having a structure shown by the following general formula (1) as a partial structure; and an organic solvent, where in the formula (1), ring structures Ar1 and Ar2 represent a benzene ring or a naphthalene ring optionally having a substituent, and W1 represents an aryl group having 6 to 30 carbon atoms and optionally having a substituent. This provides a coating-type composition for forming an organic film that can form an organic film having high pattern-curving resistance and high dry-etching resistance, the composition being excellent in solvent solubility and having a low generation of defects.
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