- 专利标题: Multi-gate semiconductor structure and method of manufacturing the same
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申请号: US17132293申请日: 2020-12-23
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公开(公告)号: US12107162B2公开(公告)日: 2024-10-01
- 发明人: Hung-Yu Wei , Pei-Hsiu Peng , Kai Jen
- 申请人: Winbond Electronics Corp.
- 申请人地址: TW Taichung
- 专利权人: WINBOND ELECTRONICS CORP.
- 当前专利权人: WINBOND ELECTRONICS CORP.
- 当前专利权人地址: TW Taichung
- 代理机构: MUNCY, GEISSLER, OLDS & LOWE, P.C.
- 优先权: TW 9104860 2020.02.15
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/77 ; H01L21/8234 ; H01L21/8238 ; H01L29/417 ; H01L29/66 ; H01L21/84 ; H01L27/088
摘要:
A multi-gate semiconductor structure and its manufacturing method are provided. The semiconductor structure includes a substrate having an active area and an isolation structure adjacent to the active area. The semiconductor structure includes a gate structure formed on the substrate and a gate dielectric layer between the gate structure and the substrate. The gate structure includes a first part above the top surface of the substrate and a second part connected to the first part. The second part of the gate structure is formed in the isolation structure, wherein the isolation structure is in direct contact with the bottom surface and sidewalls of the second part of the gate structure. A method of manufacturing the semiconductor structure includes partially etching the isolation structure to form a trench exposing the top portion of sidewalls of the substrate. The gate dielectric layer and the gate structure extend into the trench.
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