Invention Grant
- Patent Title: Laser device and electronic device manufacturing method
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Application No.: US17817839Application Date: 2022-08-05
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Publication No.: US12113326B2Publication Date: 2024-10-08
- Inventor: Yoichi Sasaki , Kouji Kakizaki , Hakaru Mizoguchi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/036
- IPC: H01S3/036 ; G03F7/20 ; H01S3/038

Abstract:
A laser device according to an aspect of the present disclosure includes a chamber into which laser gas is introduced; a pair of electrodes arranged in the chamber; a power source configured to apply a voltage between the electrodes; a nozzle structure which includes an internal passage for receiving the laser gas and a slit connected to the internal passage and is configured to generate flow of the laser gas between the electrodes due to the laser gas blowing out from the slit; a gas flow path which has a suction port through which the laser gas in the chamber is suctioned and introduces, to the nozzle structure, the laser gas suctioned through the suction port; and a blower device configured to cause the laser gas to blow toward the internal passage of the nozzle structure through the gas flow path.
Public/Granted literature
- US20220376455A1 LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2022-11-24
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