Invention Grant
- Patent Title: Method for manufacturing semiconductor structure having conductive block connected to transistor on the substrate
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Application No.: US17456480Application Date: 2021-11-24
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Publication No.: US12114481B2Publication Date: 2024-10-08
- Inventor: Jingwen Lu , Hai-Han Hung
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN 2110319528.5 2021.03.25
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
The embodiments of the present disclosure belong to the field of semiconductor manufacturing technology and relates to a method for manufacturing a semiconductor structure and a semiconductor structure. The method for manufacturing the semiconductor structure includes: a bit line structure is formed on a substrate, a fill channel is formed between the insulating structures on two adjacent bit lines; a conductor is formed within the fill channel; at least one slit is formed on the conductor along a direction perpendicular to a longitudinal direction of each of the plurality of bit line to divide the conductor into a plurality of conductive blocks, each of the plurality of conductive blocks is connected to one of transistors on the substrate.
Public/Granted literature
- US20220310619A1 METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE Public/Granted day:2022-09-29
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