- 专利标题: Low current RRAM-based crossbar array circuits implemented with interface engineering technologies
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申请号: US18058337申请日: 2022-11-23
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公开(公告)号: US12127487B2公开(公告)日: 2024-10-22
- 发明人: Minxian Zhang , Ning Ge
- 申请人: TetraMem Inc.
- 申请人地址: US CA Fremont
- 专利权人: TetraMem Inc.
- 当前专利权人: TetraMem Inc.
- 当前专利权人地址: US CA Fremont
- 代理机构: Jaffery Watson Hamilton & DeSanctis LLP
- 分案原申请号: US16921926 2020.07.06
- 主分类号: H10N70/00
- IPC分类号: H10N70/00 ; H10B63/00
摘要:
The present disclosure provides an apparatus, including: a substrate; a bottom electrode formed on the substrate; a first base oxide layer formed on the bottom electrode; a first geometric confining layer formed on the first base oxide layer, wherein the first geometric confining layer comprises a first plurality of pin-holes; a second base oxide layer formed on the first geometric confining layer and connected to a first top surface of the first base oxide layer via the first plurality of pin-holes; and a top electrode formed on the second base oxide layer. The first base oxide layer includes TaOx, HfOx, TiOx, ZrOx, or a combination thereof. The first geometric confining layer comprises Al2O3, SiO2, Si3N4, Y2O3, Gd2O3, Sm2O3, CeO2, Er2O3, or a combination thereof.
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