Invention Grant
- Patent Title: Determination of a simulated image of a specimen
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Application No.: US18076324Application Date: 2022-12-06
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Publication No.: US12131458B2Publication Date: 2024-10-29
- Inventor: Irad Peleg
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06N20/00

Abstract:
There is provided a system to examine a semiconductor specimen, the system comprising a processor and memory circuitry configured to obtain a training sample comprising an image of a semiconductor specimen and a design image based on design data, train a machine learning module, wherein the training includes minimizing a function representative of a difference between a simulated image generated by the machine learning module based on a given design image, and a corrected image corresponding to a given image after correction of pixel position of the given image in accordance with a given displacement matrix, wherein the minimizing includes optimizing parameters of the machine learning module and of the given displacement matrix, wherein the trained machine learning module is usable to generate a simulated image of a specimen based on a design image of the specimen.
Public/Granted literature
- US20230096362A1 DETERMINATION OF A SIMULATED IMAGE OF A SPECIMEN Public/Granted day:2023-03-30
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