- Patent Title: Polishing fluid collection apparatus and methods related thereto
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Application No.: US17430688Application Date: 2019-04-04
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Publication No.: US12138741B2Publication Date: 2024-11-12
- Inventor: Lizhong Sun , Peng Liu , Jianjun Hu
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/CN2019/081499 WO 20190404
- International Announcement: WO2020/199193 WO 20201008
- Main IPC: B24B55/12
- IPC: B24B55/12 ; B24B37/00 ; B24B57/02

Abstract:
Embodiments of the present disclosure generally provide apparatus for collecting and reuse polishing fluids and methods related thereto. In particular, the apparatus and methods provided herein feature a polishing fluid collection system used to collect and reuse polishing fluids dispensed during the chemical mechanical polishing (CMP) of a substrate in an electronic device manufacturing process. In one embodiment, a polishing fluid catch basin assembly includes a catch basin sized to surround at least a portion of a polishing platen and to be spaced apart therefrom. The catch basin features an outer wall, an inner wall disposed radially inward of the outer wall, and a base portion connecting the inner wall to the outer wall. The outer wall, the inner wall, and the base portion collectively define a trough. A radially inward facing surface of the inner wall is defined by an arc radius which is greater than a radius of the polishing platen the catch basin is sized to surround.
Public/Granted literature
- US20220193863A1 POLISHING FLUID COLLECTION APPARATUS AND METHODS RELATED THERETO Public/Granted day:2022-06-23
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