Invention Grant
- Patent Title: Probe head and probe card comprising same
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Application No.: US17912518Application Date: 2021-03-23
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Publication No.: US12169212B2Publication Date: 2024-12-17
- Inventor: Bum Mo Ahn , Sung Hyun Byun , Dong Hyeok Seo
- Applicant: POINT ENGINEERING CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: POINT ENGINEERING CO., LTD.
- Current Assignee: POINT ENGINEERING CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: JCIPRNET
- Priority: KR10-2020-0036448 20200325
- International Application: PCT/KR2021/003564 WO 20210323
- International Announcement: WO2021/194213 WO 20210930
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R31/28
Abstract:
Proposed are a probe head for testing, through a probe, a pattern formed on a wafer, and a probe card having the same. More particularly, proposed are a probe head in which formation of a guide hole into which a probe is inserted and insertion of the probe therein are facilitated, and a probe card having the same.
Public/Granted literature
- US12135338B2 Probe head and probe card comprising same Public/Granted day:2024-11-05
Information query
