Invention Grant
- Patent Title: Utilize machine learning in selecting high quality averaged SEM images from raw images automatically
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Application No.: US17268128Application Date: 2019-07-26
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Publication No.: US12182983B2Publication Date: 2024-12-31
- Inventor: Chen Zhang , Qiang Zhang , Jen-Shiang Wang , Jiao Liang
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2019/070142 WO 20190726
- International Announcement: WO2020/035285 WO 20200220
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N23/2251 ; G03F7/00

Abstract:
A method for evaluating images of a printed pattern. The method includes obtaining a first averaged image of the printed pattern, where the first averaged image is generated by averaging raw images of the printed pattern. The method also includes identifying one or more features of the first averaged image. The method further includes evaluating the first averaged image, using an image quality classification model and based at least on the one or more features. The evaluating includes determining, by the image quality classification model, whether the first averaged image satisfies a metric.
Public/Granted literature
- US20220351359A1 UTILIZE MACHINE LEARNING IN SELECTING HIGH QUALITY AVERAGED SEM IMAGES FROM RAW IMAGES AUTOMATICALLY Public/Granted day:2022-11-03
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