Invention Grant
- Patent Title: Method of fabricating a through glass via on a suspended nanocrystalline diamond
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Application No.: US17606380Application Date: 2020-04-14
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Publication No.: US12227446B2Publication Date: 2025-02-18
- Inventor: Stoffel Dominique Janssens , David Vazquez-Cortes , Alessandro Giussani , Eliot Martin Fried
- Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Applicant Address: JP Okinawa
- Assignee: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Current Assignee: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Current Assignee Address: JP Okinawa
- Agency: Rimon P.C.
- International Application: PCT/JP2020/016402 WO 20200414
- International Announcement: WO2020/222297 WO 20201105
- Main IPC: C03C17/22
- IPC: C03C17/22 ; C03C15/00 ; C03C23/00 ; C03C25/6208

Abstract:
Low-cost and robust platforms are key for the development of next-generation 3D micro- and nanodevices. To fabricate such platforms, nanocrystalline diamond (NCD) is a highly appealing material due to its biocompatibility, robustness, and mechanical, electrical, electrochemical, and optical properties, while glass substrates with through vias are ideal interposers for 3D integration due to the excellent properties of glass. A low-cost process—free of photolithography and transfer printing—for fabricating arrays of TGVs that are sealed with suspended portions of an ultra-thin NCD film on one side is presented. These highly transparent structures may serve as a platform for the development of microwells for single-cell culture and analysis, 3D integrated devices such as microelectrodes, and quantum technologies. It is also possible to replace the NCD with silicon nitride or silicon carbide, allowing for the development of complex heterogeneous structures on a small scale.
Public/Granted literature
- US20220212982A1 METHOD OF FABRICATING A THROUGH GLASS VIA ON A SUSPENDED NANOCRYSTALLINE DIAMOND Public/Granted day:2022-07-07
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