- Patent Title: Micro-electromechanical device for use in a flow control apparatus
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Application No.: US17475296Application Date: 2021-09-14
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Publication No.: US12235144B2Publication Date: 2025-02-25
- Inventor: Nir Merry , Ming Xu
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G01F1/684
- IPC: G01F1/684 ; G01P5/12

Abstract:
Disclosed herein are embodiments of a sensor device, systems incorporating the same, and methods of fabricating the same. In one embodiment, a sensor device comprises a free-standing sensing element, such as a micro-electromechanical system (MEMS) device. The sensor device further comprises a metallic band to facilitate mounting the MEMS device to a mounting plate. The sensor device further comprises a conformal coating on a least a portion of a sensor region of the sensor device.
Public/Granted literature
- US20220081282A1 MICRO-ELECTROMECHANICAL DEVICE FOR USE IN A FLOW CONTROL APPARATUS Public/Granted day:2022-03-17
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