Invention Grant
- Patent Title: Laser processing device for forming a modified region in an object and laser processing method
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Application No.: US17641519Application Date: 2020-09-09
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Publication No.: US12246397B2Publication Date: 2025-03-11
- Inventor: Takafumi Ogiwara , Takeshi Sakamoto
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle Reath LLP
- Priority: JP2019-165708 20190911
- International Application: PCT/JP2020/034174 WO 20200909
- International Announcement: WO2021/049546 WO 20210318
- Main IPC: B23K26/53
- IPC: B23K26/53 ; B23K26/067 ; H01L21/268 ; H01L21/67 ; B23K103/00 ; G02F1/133

Abstract:
A laser processing apparatus includes a support part, a light source, a spatial light modulator, a converging part, and a controller. The controller controls the spatial light modulator so that laser light is branched into a plurality of rays of processing light including 0th-order light and a plurality of converging points for the plurality of rays of processing light are located at positions different from each other in a Z direction and an X direction, and controls at least one of the support part and the converging part. The controller controls the spatial light modulator so that a converging point of the 0th-order light in the Z direction is located on an opposite side of a converging point of non-modulated light of the laser light with respect to an ideal converging point of the 0th-order light.
Public/Granted literature
- US20220331907A1 LASER PROCESSING DEVICE AND LASER PROCESSING METHOD Public/Granted day:2022-10-20
Information query
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